MEMS device (1) 썸네일형 리스트형 [SolidState] Hard disk drive performance enhanced by MEMS devices Date: 5?, 2003 Roger Hipwell Kyle Bartholomew Wayne Bonin Zine-Eddine Boutaghou Abdul Lateef Overview Microelectromechanical systems technology is a collection of miniature sensors and actuators that are fabricated using semiconductor-manufacturing techniques. MEMS have been used since the early 1990s in airbag sensors and ink-jet printer heads. One promising new arena for MEMS devices is high-p.. 이전 1 다음